本規(guī)范共分15章和4個(gè)附錄。主要內(nèi)容有:總則、術(shù)語(yǔ)、電子產(chǎn)品生產(chǎn)環(huán)境設(shè)計(jì)要求、總體設(shè)計(jì)、工藝設(shè)計(jì)、潔凈建筑設(shè)計(jì)、空氣凈化和空調(diào)通風(fēng)設(shè)計(jì)、給水排水設(shè)計(jì)、純水供應(yīng)、氣體供應(yīng)、化學(xué)品供應(yīng)、電氣設(shè)計(jì)、防靜電與接地設(shè)計(jì)、噪聲控制、微振控制等。

GB50472-2008······1

1 總則······10

2 術(shù)語(yǔ)······11

3 電子產(chǎn)品生產(chǎn)環(huán)境設(shè)計(jì)要求······15

3.1 一般規(guī)定······15

3.2 生產(chǎn)環(huán)境設(shè)計(jì)要求······15

4 總體設(shè)計(jì)······17

4.1 位置選擇和總平面布置······17

4.2 潔凈室型式······18

4.3 潔凈室布置和綜合協(xié)調(diào)······18

5 工藝設(shè)計(jì)······20

5.1 一般規(guī)定······20

5.2 工藝布局······20

5.3 人員凈化······21

5.4 物料凈化······22

5.5 設(shè)備及工器具······22

6 潔凈建筑設(shè)計(jì)······24

6.1 一般規(guī)定······24

6.2 防火和疏散······25

6.3 室內(nèi)裝修······26

7 空氣凈化和空調(diào)通風(fēng)設(shè)計(jì)······28

7.1 一般規(guī)定······28

7.2 氣流流型和送風(fēng)量······29

7.3 凈化空調(diào)系統(tǒng)······30

7.4 空氣凈化設(shè)備······30

7.5 采暖、通風(fēng)······32

7.6 排煙······34

7.7 風(fēng)管、附件······34

8 給水排水設(shè)計(jì)······36

8.1 一般規(guī)定······36

8.2 給水······36

8.3 排水······37

8.4 雨水······37

8.5 消防給水和滅火設(shè)備······37

9 純水供應(yīng)······39

9.1 一般規(guī)定······39

9.2 純水系統(tǒng)······39

9.3 管材、閥門(mén)和附件······40

10 氣體供應(yīng)······41

10.1 一般規(guī)定······41

10.2 常用氣體系統(tǒng)······42

10.3 干燥壓縮空氣系統(tǒng)······44

10.4 特種氣體系統(tǒng)······44

11 化學(xué)品供應(yīng)······46

11.1 一般規(guī)定······46

11.2 化學(xué)品儲(chǔ)存、輸送······46

11.3 管材、閥門(mén)······48

12 電氣設(shè)計(jì)······49

12.1 配電······49

12.2 照明······50

12.3 通信與安全保護(hù)裝置······51

12.4 自動(dòng)控制······53

12.5 接地······53

13 防靜電與接地設(shè)計(jì)······55

13.1 一般規(guī)定······55

13.2 防靜電措施······55

13.3 防靜電接地······57

14 噪聲控制······58

14.1 一般規(guī)定······58

14.2 噪聲控制設(shè)計(jì)······58

15 微振控制······60

15.1 一般規(guī)定······60

15.2 容許振動(dòng)值······60

15.3 微振動(dòng)控制設(shè)計(jì)······60

附錄A 各類(lèi)電子產(chǎn)品生產(chǎn)對(duì)空氣潔凈度等級(jí)的要求······62

附錄B 電子產(chǎn)品生產(chǎn)間/工序的火災(zāi)危險(xiǎn)性分類(lèi)舉例······64

附錄C 精密儀器、設(shè)備的容許振動(dòng)值舉例······65

附錄D 潔凈室（區(qū)）性能測(cè)試和認(rèn)證······66

本規(guī)范用詞說(shuō)明······74

附:條文說(shuō)明······75

1 總則······79

3 電子產(chǎn)品生產(chǎn)環(huán)境設(shè)計(jì)要求······80

3.1 一般規(guī)定······80

3.2 生產(chǎn)環(huán)境設(shè)計(jì)要求······82

4 總體設(shè)計(jì)······93

4.1 位置選擇和總平面布置······93

4.2 潔凈室型式······95

4.3 潔凈室布置和綜合協(xié)調(diào)······98

5 工藝設(shè)計(jì)······100

5.1 一般規(guī)定······100

5.2 工藝布局······100

5.3 人員凈化······102

5.4 物料凈化······104

5.5 設(shè)備及工器具······105

6 潔凈建筑設(shè)計(jì)······108

6.1 一般規(guī)定······108

6.2 防火和疏散······109

6.3 室內(nèi)裝修······115

7 空氣凈化和空調(diào)通風(fēng)設(shè)計(jì)······117

7.1 一般規(guī)定······117

7.2 氣流流型和送風(fēng)量······118

7.3 凈化空調(diào)系統(tǒng)······121

7.4 空氣凈化設(shè)備······124

7.5 采暖、通風(fēng)······126

7.6 排煙······128

7.7 風(fēng)管、附件······129

8 給水排水設(shè)計(jì)······131

8.1 一般規(guī)定······131

8.2 給水······132

8.3 排水······133

8.4 雨水······134

8.5 消防給水和滅火設(shè)備······134

9 純水供應(yīng)······136

9.1 一般規(guī)定······136

9.2 純水系統(tǒng)······137

9.3 管材、閥門(mén)和附件······138

10 氣體供應(yīng)······140

10.1 一般規(guī)定······140

10.2 常用氣體系統(tǒng)······143

10.3 干燥壓縮空氣系統(tǒng)······145

10.4 特種氣體系統(tǒng)······146

11 化學(xué)品供應(yīng)······149

11.1 一般規(guī)定······149

11.2 化學(xué)品儲(chǔ)存、輸送······150

11.3 管材、閥門(mén)······152

12 電氣設(shè)計(jì)······154

12.1 配電······154

12.2 照明······155

12.3 通信與安全保護(hù)裝置······156

12.4 自動(dòng)控制······159

12.5 接地······160

13 防靜電與接地設(shè)計(jì)······162

13.1 一般規(guī)定······162

13.2 防靜電措施······162

13.3 防靜電接地······164

14 噪聲控制······166

14.1 一般規(guī)定······166

14.2 噪聲控制設(shè)計(jì)······166

15 微振控制······168

15.1 一般規(guī)定······168

15.2 容許振動(dòng)值······168

15.3 微振動(dòng)控制設(shè)計(jì)······169