GB50809-2012······1

1 總 則······11

2 術 語······12

3 工藝設計······14

3.1 一般規定······14

3.2 技術選擇······14

3.3 工藝布局······14

4 總體設計······17

4.1 廠址選擇······17

4.2 總體規劃及布局······17

5 建筑與結構······18

5.1 建筑······18

5.2 結構······18

5.3 防火疏散······19

6 防微振······20

6.1 一般規定······20

6.2 結構······20

6.3 機械······21

7 冷熱源······22

8 給排水及消防······24

8.1 一殷規定······24

8.2 給排水······24

8.3 消防······25

8.4 滅火器······27

9 電 氣······28

9.1 供配電······28

9.2 照明······28

9.3 接地······29

9.4 防靜電······29

9.5 通信與安全保護······30

9.6 電磁屏蔽······31

10 工藝相關系統······33

10.1 凈化區······33

10.2 工藝排風······34

10.3 純水······35

10.4 廢水······37

10.5 工藝循環冷卻水······37

10.6 大宗氣體······38

10.7 干燥壓縮空氣······39

10.8 真空······40

10.9 特種氣體······41

10.10 化學品······42

11 空間管理······45

12 環境安全衛生······47

本規范用詞說明······48

引用標準名錄······49

附:條文說明······51

1 總 則······55

3 工藝設計······56

3.1 一般規定······56

3.2 技術選擇······56

3.3 工藝布局······57

4 總體設計······62

4.1 廠址選擇······62

4.2 總體規劃及布局······62

5 建筑與結構······63

5.1 建筑······63

5.2 結構······63

5.3 防火疏散······64

6 防微振······65

6.1 一般規定······65

6.2 結構······68

6.3 機械······68

7 冷熱源······69

8 給排水及消防······70

8.1 一般規定······70

8.2 給排水······71

8.3 消防······72

8.4 滅火器······74

9 電 氣······75

9.1 供配電······75

9.2 照明······75

9.5 通信與安全保護······75

10 工藝相關系統······77

10.1 凈化區······77

10.2 工藝排風······81

10.4 廢水······86

10.5 工藝循環冷卻水······87

10.6 大宗氣體······88

10.7 干燥壓縮空氣······89

10.9 特種氣體······89

10.10 化學品······90

11 空間管理······93

12 環境安全衛生······94